Electrical and band structural analyses of Ti1−x Al x O y films grown by atomic layer deposition on p-type GaAs

Author: An Youngseo   Mahata Chandreswar   Lee Changmin   Choi Sungho   Byun Young-Chul   Kang Yu-Seon   Lee Taeyoon   Kim Jiyoung   Cho Mann-Ho   Kim Hyoungsub  

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|41|415302-415308

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.41, 2015-10, pp. : 415302-415308

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