Comparative Investigations of the Surface Damage of Monocrystalline Silicon Wafers by Scanning Infrared Reflection Examination and Raman Spectroscopy

Publisher： Trans Tech Publications

E-ISSN： 1662-9779|2015|242|466-471

ISSN： 1012-0394

Source： Solid State Phenomena, Vol.2015, Iss.242, 2016-02, pp. : 466-7

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