Texture-controlled diamond films synthesized by microwave plasma-enhanced chemical vapour deposition

By Kim Y.-K.   Lee K.-Y.   Lee J.-Y.  

Thin Solid Films, Vol. 272, Iss. 1, 1996-01 ,pp. : 64-70

Elsevier

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Optical, structural and electrical properties of devicequality hydrogenated amorphous silicon-nitrogen films deposited by plasma-enhanced chemical vapour deposition

By Giorgis F.   Giuliani F.   Pirri C. F.   Tresso E.   Summonte C.   Rizzoli R.   Galloni R.   Desalvo A.   Rava P.  

Philosophical Magazine B, Vol. 77, Iss. 4, 1998-04 ,pp. : 925-944

Taylor & Francis Ltd

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Growth and morphological studies of (100) textured diamond thin films by microwave plasma-enhanced chemical vapor deposition

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Thin Solid Films, Vol. 270, Iss. 1, 1995-12 ,pp. : 210-214

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Study of the effect of different plasma-enhanced chemical vapour deposition reactor configurations on the properties of hydrogenated amorphous silicon thin films

By Aguas H.   Silva V.   Ferreira I.   Fortunato E.   Martins R.  

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Effect of hydrogen dilution on the growth of nanocrystalline silicon films at high temperature by using plasma-enhanced chemical vapor deposition

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Thin Solid Films, Vol. 437, Iss. 1, 2003-08 ,pp. : 68-73

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