Author： Abbas K Alaie S Baboly M Ghasemi Elahi M M M Anjum D H Chaieb S Leseman Z C
Publisher： IOP Publishing
E-ISSN： 1361-6439|26|1|15007-15013
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.26, Iss.1, 2016-01, pp. : 15007-15013
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