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Author: Chen Yuan-Liu Cai Yindi Shimizu Yuki Ito So Gao Wei Ju Bing-Feng
Publisher: IOP Publishing
E-ISSN: 1361-6439|26|2|25002-25011
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.26, Iss.2, 2016-02, pp. : 25002-25011
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Abstract
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