A new hybrid scheme for simulations of highly collisional RF-driven plasmas

Author: Eremin Denis   Hemke Torben   Mussenbrock Thomas  

Publisher: IOP Publishing

E-ISSN: 1361-6595|25|1|15009-15017

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.25, Iss.1, 2016-02, pp. : 15009-15017

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Abstract