Photolithography with polymethyl methacrylate (PMMA)

Author： Carbaugh Daniel J Wright Jason T Parthiban Rajan Rahman Faiz

E-ISSN： 1361-6641|31|2|25010-25019

ISSN： 0268-1242

Source： Semiconductor Science and Technology, Vol.31, Iss.2, 2016-02, pp. : 25010-25019

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