Height control for small periodic structures using x-ray radiography

Author: Schüttler M   Meyer P   Schaff F   Yaroshenko A   Kunka D   Besser H   Pfeiffer F   Mohr J  

Publisher: IOP Publishing

E-ISSN: 1361-6501|27|2|25015-25020

ISSN: 0957-0233

Source: Measurement Science and Technology, Vol.27, Iss.2, 2016-02, pp. : 25015-25020

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Abstract