Author: Dai Jie Chiu Yu-Jui Lian Ian Wu Tsung-Feng Yang Kecheng Lo Yu-Hwa
Publisher: IOP Publishing
E-ISSN: 1361-6439|26|2|25007-25014
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.26, Iss.2, 2016-02, pp. : 25007-25014
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