Interface annealing characterization of Ti/Al/Au ohmic contacts to p-type 4H-SiC

Author: Chao Han   Yuming Zhang   Qingwen Song   Xiaoyan Tang   Hui Guo   Yimen Zhang   Fei Yang   Yingxi Niu  

Publisher: IOP Publishing

ISSN: 1674-4926

Source: Journal of Semiconductors, Vol.36, Iss.12, 2015-12, pp. : 123006-123014

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