3D LTCC structure for a large-volume cavity-type chemical microreactor

Author: Belavič Darko   Hrovat Marko   Makarovič Kostja   Dolanč Gregor   Pohar Andrej   Hočevar Stanko   Malič Barbara  

Publisher: Emerald Group Publishing Ltd

E-ISSN: 1758-812X|32|3|133-137

ISSN: 1356-5362

Source: Microelectronics International, Vol.32, Iss.3, 2015-08, pp. : 133-137

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Abstract