Publisher: IOP Publishing
E-ISSN: 1742-6596|646|1|204-207
ISSN: 1742-6596
Source: Journal of Physics: Conference Series , Vol.646, Iss.1, 2015-10, pp. : 204-207
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
An electrostatic suspension system using piezoelectric actuators
By Le T T Jeon J U Woo S J Higuchi T
Smart Materials and Structures, Vol. 21, Iss. 2, 2012-02 ,pp. :
Analysis of Quality Design Techniques for Electrostatic Actuators
Journal of Physics: Conference Series , Vol. 34, Iss. 1, 2006-04 ,pp. :
Review on the Modeling of Electrostatic MEMS
By Chuang Wan-Chun Lee Hsin-Li Chang Pei-Zen Hu Yuh-Chung
Sensors, Vol. 10, Iss. 6, 2010-06 ,pp. :