Review on the Modeling of Electrostatic MEMS

Author： Chuang Wan-Chun Lee Hsin-Li Chang Pei-Zen Hu Yuh-Chung

Publisher： MDPI

E-ISSN： 1424-8220|10|6|6149-6171

ISSN： 1424-8220

Source： Sensors, Vol.10, Iss.6, 2010-06, pp. : 6149-6171

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Abstract

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