Physical Properties of Copper Films Deposited by Compact-Size Magnetron Sputtering Source with Changing Magnetic Field Strength

Publisher： Trans Tech Publications

E-ISSN： 1662-9795|2016|675|193-196

ISSN： 1013-9826

Source： Key Engineering Materials, Vol.2016, Iss.675, 2016-02, pp. : 193-196

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