SiO2/Si Interfacial Degradation and the Role of Oxygen Interstitials

Publisher： Edp Sciences

E-ISSN： 1286-4897|6|12|1569-1594

ISSN： 1155-4320

Source： Journal de Physique III, Vol.6, Iss.12, 1996-12, pp. : 1569-1594

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