Atomic layer deposition of vanadium oxide thin films from tetrakis(dimethylamino)vanadium precursor

Publisher: Cambridge University Press

E-ISSN: 2044-5326|32|1|37-44

ISSN: 0884-2914

Source: Journal of Materials Research, Vol.32, Iss.1, 2016-09, pp. : 37-44

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Abstract