Site-selective deposition and micropatterning of tantalum oxide thin films using a monolayer

Author: Masuda Y.   Wakamatsu S.   Koumoto K.  

Publisher: Elsevier

ISSN: 0955-2219

Source: Journal of the European Ceramic Society, Vol.24, Iss.2, 2004-01, pp. : 301-307

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Abstract