Ultra-thin silicon nitride barrier implementation for Si nano-crystals embedded in amorphous silicon carbide matrix with hybrid superlattice structure

Author: Wan Z.   Patterson R.   Huang S.   Green M.   Conibeer G.  

Publisher: Edp Sciences

E-ISSN: 1286-4854|95|6|67006-67006

ISSN: 0295-5075

Source: EPL (EUROPHYSICS LETTERS), Vol.95, Iss.6, 2011-09, pp. : 67006-67006

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Abstract