Ultra-thin high-quality silicon nitride films on Si(111)

Author： Falta J.   Schmidt Th.   Gangopadhyay S.   Clausen T.   Brunke O.   Flege J. I.   Heun S.   Bernstorff S.   Gregoratti L.   Kiskinova M.  

Publisher： Edp Sciences

E-ISSN： 1286-4854|94|1|16003-16003

ISSN： 0295-5075

Source： EPL (EUROPHYSICS LETTERS), Vol.94, Iss.1, 2011-04, pp. : 16003-16003

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