Transport coefficients for electron scattering in CF4/Ar/O2 mixtures with a significant presence of Fx or CFx radicals

Author： Nikitović Ž.   Stojanović V.   Petrović Z. Lj.   Cvelbar U.   Mozetič M.  

Publisher： Edp Sciences

E-ISSN： 1286-4854|91|5|55001-55001

ISSN： 0295-5075

Source： EPL (EUROPHYSICS LETTERS), Vol.91, Iss.5, 2010-09, pp. : 55001-55001

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