Dry Etching with Nanoparticles: Formation of High Aspect‐Ratio Pores and Channels Using Magnetic Gold Nanoclusters

E-ISSN： 1521-4095|30|3|adma.201703091-adma.201703091

ISSN： 0935-9648

Source： ADVANCED MATERIALS, Vol.30, Iss.3, 2018-01, pp. : n/a-n/a

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