Effect of time-varying axial magnetic field on high aspect ratio contact hole etching

Author： Song H.-Y.   Choi Y.-H.   O B.-h.   Park S.-G.   Oh J.-S.   Kim J.-W.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.435, Iss.1, 2003-07, pp. : 247-251

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