E‐ and H‐mode transition in a low pressure inductively coupled ammonia plasma

E-ISSN： 1612-8869|15|1|ppap.201700105-ppap.201700105

ISSN： 1612-8850

Source： PLASMA PROCESSES AND POLYMERS (ELECTRONIC), Vol.15, Iss.1, 2018-01, pp. : n/a-n/a

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