Cubic boron nitride thin film synthesis on silica substrates by low-pressure inductively-coupled r.f. plasma chemical vapor deposition

Author: Chattopadhyay K.K.   Matsumoto S.   Zhang Y.-F.   Sakaguchi I.   Nishitani-Gamo M.   Ando T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.354, Iss.1, 1999-10, pp. : 24-28

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Abstract