用于大面积薄膜沉积的线形等离子体源研究进展 Research Progress of the Linear Plasma Source Used in the Films Deposition over Large Areas

Author: 左潇   陈龙威   魏钰   赵颖   孟月东  

Publisher: 汉斯出版社

ISSN: 2160-7575

Source: Applied Physics, Vol.02, Iss.04, 2012-10, pp. : 109-115

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Abstract