Depth dependences of the ion bombardment induced roughness and of the interdiffusion coefficient for Si/Al multilayers

Author: Wang J.Y.   Zalar A.   Mittemeijer E.J.  

Publisher: Elsevier

ISSN: 0169-4332

Source: Applied Surface Science, Vol.222, Iss.1, 2004-01, pp. : 171-179

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