Prediction of profile surface roughness in CHF 3 /CF 4 plasma using neural network

Author: Kim B.   Kim K.  

Publisher: Elsevier

ISSN: 0169-4332

Source: Applied Surface Science, Vol.222, Iss.1, 2004-01, pp. : 17-22

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract