Micromachining of large area amorphous carbon membranes prepared by filtered cathodic vacuum arc technique

Author: Liujiang Y.   Tay B.K.   Sheeja D.   Fu Y.Q.   Miao J.M.  

Publisher: Elsevier

ISSN: 0169-4332

Source: Applied Surface Science, Vol.223, Iss.4, 2004-02, pp. : 286-293

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