The investigation of carbon nitride films deposited at various substrate temperatures and N 2 /Ar flow ratios by vacuum cathodic arc method

Author: Zhou Z.   Xia L.   Sun M.  

Publisher: Elsevier

ISSN: 0169-4332

Source: Applied Surface Science, Vol.222, Iss.1, 2004-01, pp. : 327-337

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content