Monolithic integrated SAW filter based on AlN for high-frequency applications

Author: Udo Ch Kaletta   Santos Paulo V.   Wolansky Dirk   Scheit Alexander   Fraschke Mirko   Wipf Christian   Zaumseil Peter   Wenger Christian  

Publisher: IOP Publishing

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.28, Iss.6, 2013-06, pp. : 65013-65019

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