A comprehensive study of polysilicon resistors for CMOS ULSI applications

Author： Chuang H.-M.   Thei K.-B.   Tsai S.-F.   Lu C.-T.   Liao X.-D.   Lee K.-M.   Chen H.-R.   Liu W.-C.  

Publisher： Elsevier

ISSN： 0749-6036

Source： Superlattices and Microstructures, Vol.33, Iss.4, 2003-04, pp. : 193-208

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