Effect of gas pressure on the sensitivity of a micromachined thermal accelerometer

Author: Mailly F.   Martinez A.   Giani A.   Pascal-Delannoy F.   Boyer A.  

Publisher: Elsevier

ISSN: 0924-4247

Source: Sensors and Actuators A: Physical, Vol.109, Iss.1, 2003-12, pp. : 88-94

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next