Related content

Thermal fatigue modeling of micromachined gas sensors

By Puigcorbe J.   Vila A.   Morante J.R.  

Sensors and Actuators B: Chemical, Vol. 95, Iss. 1, 2003-10 ,pp. : 275-281

Elsevier

Access to resources Recommend Favorite

Manufacturing of surface micromachined structures for chemical sensors

By Moldovan C.   Kim B.-H.   Raible S.   Moagar V.  

Thin Solid Films, Vol. 383, Iss. 1, 2001-02 ,pp. : 321-324

Elsevier

Access to resources Recommend Favorite

Preparation of SnO 2 films with high sensitivity and selectivity to C 2 H 5 OH by oxygen radical assisted electron beam evaporation for micro-machined gas sensors

By Mo Y.   Okawa Y.   Nakai T.   Tajima M.   Natukawa K.  

Thin Solid Films, Vol. 416, Iss. 1, 2002-09 ,pp. : 248-253

Elsevier

Access to resources Recommend Favorite

Effect of gas pressure on the sensitivity of a micromachined thermal accelerometer

By Mailly F.   Martinez A.   Giani A.   Pascal-Delannoy F.   Boyer A.  

Sensors and Actuators A: Physical, Vol. 109, Iss. 1, 2003-12 ,pp. : 88-94

Elsevier

Access to resources Recommend Favorite

Sol-gel derived PNNZT thin films for micromachined piezoelectric force sensors

By Lee C.   Itoh T.   Suga T.  

Thin Solid Films, Vol. 299, Iss. 1, 1997-05 ,pp. : 88-93

Elsevier

Access to resources Recommend Favorite