An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations

Author: Hao Z.   Erbil A.   Ayazi F.  

Publisher: Elsevier

ISSN: 0924-4247

Source: Sensors and Actuators A: Physical, Vol.109, Iss.1, 2003-12, pp. : 156-164

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