Hard amorphous carbon-fluorine films deposited by PECVD using C 2 H 2 -CF 4 gas mixtures as precursor atmospheres

Author: Jacobsohn L.G.   Maia da Costa M.E.H.   Trava-Airoldi V.J.   Freire F.L.  

Publisher: Elsevier

ISSN: 0925-9635

Source: Diamond and Related Materials, Vol.12, Iss.10, 2003-10, pp. : 2037-2041

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