A comparative study between pure and Al-containing amorphous carbon films prepared by FCVA technique together with high substrate pulse biasing

Author： Sheeja D.   Tay B.K.   Sze J.Y.   Yu L.J.   Lau S.P.  

Publisher： Elsevier

ISSN： 0925-9635

Source： Diamond and Related Materials, Vol.12, Iss.10, 2003-10, pp. : 2032-2036

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