Atomistic simulation of energy and temperature effects in the deposition and implantation of amorphous carbon thin films

Author: Marks N.A.   Bell J.M.   Pearce G.K.   McKenzie D.R.   Bilek M.M.M.  

Publisher: Elsevier

ISSN: 0925-9635

Source: Diamond and Related Materials, Vol.12, Iss.10, 2003-10, pp. : 2003-2010

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