Synthesis of amorphous carbon films by plasma-based ion implantation with simultaneous application of DC and pulse bias

Author: Watanabe T.   Yamamoto K.   Tsuda O.   Tanaka A.   Koga Y.   Takai O.  

Publisher: Elsevier

ISSN: 0925-9635

Source: Diamond and Related Materials, Vol.12, Iss.10, 2003-10, pp. : 2083-2087

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