On-chip electrometer using MEMS parallel-plate pull-in sensing

By Webb Russell Y.   MacDonald Noel C.  

International Journal of Intelligent Systems Technologies and Applications, Vol. 3, Iss. 1-2, 2007-06 ,pp. : 149-162

Inderscience Publishers

Access to resources Recommend Favorite

High aspect ratio air core solenoid inductors using an improved UV-LIGA process with contrast enhancement material

By Lu Hong   Pillans Brandon   Lee Jong-Chan   Kim Kyunghwan   Lee Jeong-Bong  

Microsystem Technologies, Vol. 13, Iss. 3-4, 2007-02 ,pp. : 409-409

Springer Publishing Company

Access to resources Recommend Favorite

High aspect ratio air core solenoid inductors using an improved UV-LIGA process with contrast enhancement material

By Lu Hong   Pillans Brandon   Lee Jong-Chang   Lee Jeong-Bong  

Microsystem Technologies, Vol. 13, Iss. 3-4, 2007-02 ,pp. : 237-243

Springer Publishing Company

Access to resources Recommend Favorite

Toward on-chip datacenters: a perspective on general trends and on-chip particulars

By Kas Miray  

The Journal of Supercomputing, Vol. 62, Iss. 1, 2012-10 ,pp. : 214-226

Springer Publishing Company

Access to resources Recommend Favorite

An on-chip micro-friction tester for tribology research of silicon based MEMS devices

By Guo Zhanshe   Meng Yonggang   Su Caijun   Wu Hao  

Microsystem Technologies, Vol. 14, Iss. 1, 2008-01 ,pp. : 109-118

Springer Publishing Company

Access to resources Recommend Favorite