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Period of time: 2014年9-11期
Publisher: Springer Publishing Company
Founded in: 1995
Total resources: 27
ISSN: 0946-7076
Subject: TP Automation Technology , Computer Technology
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Microsystem Technologies,volume 14,issue 9-11
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Special issue of the high-aspect-ratio micro-structure technology workshop, HARMST
By Khan Malek Chantal in (2008)
Microsystem Technologies,volume 14,issue 9-11 , Vol. 14, Iss. 9-11, 2008-10 , pp.![](/images/ico/ico5.png)
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Fabricating HARMS by using megasonic assisted electroforming
Microsystem Technologies,volume 14,issue 9-11 , Vol. 14, Iss. 9-11, 2008-10 , pp.![](/images/ico/ico5.png)
Statistical process and measurement control for micro production
Microsystem Technologies,volume 14,issue 9-11 , Vol. 14, Iss. 9-11, 2008-10 , pp.![](/images/ico/ico5.png)
High throughput projection UV lithography of high-aspect-ratio thick SU-8 microstructures
Microsystem Technologies,volume 14,issue 9-11 , Vol. 14, Iss. 9-11, 2008-10 , pp.![](/images/ico/ico5.png)
Fabrication of ceramic microcomponents and microreactor for the steam reforming of ethanol
Microsystem Technologies,volume 14,issue 9-11 , Vol. 14, Iss. 9-11, 2008-10 , pp.![](/images/ico/ico5.png)
Fabrication of Fresnel zone plates with high aspect ratio by soft X-ray lithography
Microsystem Technologies,volume 14,issue 9-11 , Vol. 14, Iss. 9-11, 2008-10 , pp.![](/images/ico/ico5.png)
Applications of thick Sacrificial-Layer of zinc in LIGA process
Microsystem Technologies,volume 14,issue 9-11 , Vol. 14, Iss. 9-11, 2008-10 , pp.![](/images/ico/ico5.png)
Fast patterning microstructures using inkjet printing conformal masks
Microsystem Technologies,volume 14,issue 9-11 , Vol. 14, Iss. 9-11, 2008-10 , pp.![](/images/ico/ico5.png)
On the simulation of molded micro components and systems
Microsystem Technologies,volume 14,issue 9-11 , Vol. 14, Iss. 9-11, 2008-10 , pp.