![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
Author: Dreßler M.
Publisher: Springer Publishing Company
ISSN: 0946-7076
Source: Microsystem Technologies, Vol.15, Iss.1, 2009-01, pp. : 83-88
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
By Fonseca L. Cabruja E. Calaza C. Rubio R. Santander J. Figueras E. Gràcia I. Cané C. Moreno M. Marco S.
Microsystem Technologies, Vol. 10, Iss. 5, 2004-08 ,pp. :
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)