Feasibility of a flip-chip approach to integrate an IR filter and an IR detector in a future gas detection cell

Author： Fonseca L.   Cabruja E.   Calaza C.   Rubio R.   Santander J.   Figueras E.   Gràcia I.   Cané C.   Moreno M.   Marco S.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.10, Iss.5, 2004-08, pp. : 382-386

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