Performance of integrated retainer rings in silicon micro-turbines with thrust style micro-ball bearings

Author： Hergert Robert J.   Hanrahan Brendan   Ghodssi Reza   Holmes Andrew S.  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65033-65043

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