Author: Acero A.J. Rebollo-Muñoz N. Montanero J.M. Gañán-Calvo A.M. Vega E.J.
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65009-65018
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Abstract
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