Control of plasma density distribution via wireless power transfer in an inductively coupled plasma

Author： Lee Hee-Jin   Lee Hyo-Chang   Kim Young-Cheol   Chung Chin-Wook  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.22, Iss.3, 2013-06, pp. : 32002-32006

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Inductively-coupled dusty plasma

By  

Le Journal de Physique IV, Vol. 10, Iss. PR5, 2000-03 ,pp. : Pr5-399-Pr5-402

Edp Sciences

Access to resources Recommend Favorite

Standing wave effect on plasma distribution in an inductively coupled plasma source with a short antenna

By  

Journal of Physics D: Applied Physics, Vol. 47, Iss. 1, 2014-01 ,pp. : 15205-15210

IOP Publishing

Access to resources Recommend Favorite

Nanocrystalline silicon embedded in silicon suboxide synthesized in high-density inductively coupled plasma

By  

Journal of Physics D: Applied Physics, Vol. 48, Iss. 44, 2015-11 ,pp. : 445302-445309

IOP Publishing

Access to resources Recommend Favorite

Transition from E to H mode in inductively coupled oxygen plasma: Hysteresis and the behaviour of oxygen atom density

By Zaplotnik R.   Vesel A.   Mozetic M.  

EPL (EUROPHYSICS LETTERS), Vol. 95, Iss. 5, 2011-08 ,pp. : 55001-55001

Edp Sciences

Access to resources Recommend Favorite