Fabrication of NbN/AlN/NbN junctions with Al embedding circuits on Si membrane for 1.5 THz SIS mixers

Author: Villegier J.-C.   Delaet B.   Larrey V.   Salez M.   Delorme Y.   Munier J.-M.  

Publisher: Elsevier

ISSN: 0964-1807

Source: Applied Superconductivity, Vol.6, Iss.10, 1999-10, pp. : 541-545

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Abstract