Publisher： Elsevier
Founded in： 1983
Total resources： 4
E-ISSN： 1873-5568
ISSN： 0167-9317
Subject：
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Microelectronic Engineering
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Wavelet analysis of directional variations of plasma etch profile
By Choi S.R., Kim B., Kim B.S., Lee K.K. in (2004)
Microelectronic Engineering , Vol. 71, Iss. 1, 2004-01 , pp.
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