Investigation of structural properties of amorphous carbon nitride thin films prepared by xenon cloride pulsed laser deposition of camphoric carbon precursor

Author： Rusop M.   Soga T.   Jimbo T.  

Publisher： Springer Publishing Company

ISSN： 0957-4522

Source： Journal of Materials Science: Materials in Electronics, Vol.16, Iss.6, 2005-06, pp. : 365-375

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