Reconstruction of the precision surface shape of substrates for reflective X-ray optical components on the basis of single-axis profilometer measurements

Author： Savel'ev I.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1027-4510

Source： Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Vol.5, Iss.3, 2011-06, pp. : 533-538

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