Acceleration complex for extreme ultraviolet nanolithography based on a free-electron laser with kilowatt-scale average radiation power

Author: Syresin E.   Anchutkin V.   Budagov Yu.   Bel'skii A.   Gushchin O.   Lenskii I.   Ol'shevskii A.   Sisakyan A.   Trubnikov G.   Shelepin N.   Shirkov G.   Yurkov M.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1027-4510

Source: Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Vol.5, Iss.3, 2011-06, pp. : 520-525

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Abstract